Author:
Maher D. M.,Knoell R. V.,Ellington M. B.,Jacobson D. C.
Abstract
ABSTRACTThe characterization of microstructures is fundamentally important to investigations of amorphization which is induced by ion implantation and recrystallization which occurs by solid-phase, epitaxial regrowth. In this paper, microstructures of amorphized, partially regrown and fully regrown layers are described in terms of extended-defect states of the material. Initial states (i.e. amorphized) and final states (i.e. solid-phase regrown and then reordered) are defined. Transmission electron microscopy and Rutherford backscattering/ion-channeling are the analytical techniques which are used in the characterization.
Publisher
Springer Science and Business Media LLC
Cited by
10 articles.
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