Precise Control of Nucleation and Growth in Lead Zirconate Titanate Thin Films by Scanning Rapid Thermal Annealing

Abstract

AbstractIn this paper, a novel annealing method, scanning-rapid thermal annealing (RTA), for the selectively nucleated lateral crystallization (SNLC) of Pb(Zr,Ti)O3 (PZT) thin films is discussed. The effects of lamp power and scan speed on the SNLC were investigated. It was found that scanning-RTA was very effective method for SNLC in reducing the process time and preventing undesirable nucleation at other than pre-determined positions.