The Use of a Cold Gas Plasma for the Final Processing of Contamination-Free Tem Specimens

Abstract

AbstractThe issue of specimen contamination becomes more important at a rate proportional to the use of high-brightness electron source Transmission Electron Microscopes (TMM). The trend in the transmission electron microscopy of materials science specimens is to use higher-voltage microscopes incorporating field emission gun technology [1]. These FEG TEMs combine smaller electron probes with increased beam current, allowing high resolution specimen imaging and enhanced analytical data collection. This is of particular importance for semiconductor specimens which demand fine-probe microanalyis.