An apparatus for plasma cleaning and storage of transmission electron microscopy specimens and specimen holders

Author:

Tang Xu123ORCID,Gu Li Xin123,Li Qiu Li345,Du Zhong Ming36,Yang Sai Hong7,Feng Lian Jun38,Li Jin Hua123

Affiliation:

1. Electron Microscope Laboratory, Institute of Geology and Geophysics Chinese Academy of Sciences Beijing China

2. Key Laboratory of Earth and Planetary Physics, Institute of Geology and Geophysics Chinese Academy of Sciences Beijing China

3. Innovation Academy for Earth Science Chinese Academy of Sciences Beijing China

4. State Key Laboratory of Lithospheric Evolution, Institute of Geology and Geophysics Chinese Academy of Sciences Beijing China

5. College of Earth and Planetary Sciences University of Chinese Academy of Sciences Beijing China

6. Key Laboratory of Shale Gas and Geoengineering, Institute of Geology and Geophysics Chinese Academy of Sciences Beijing China

7. National Astronomical Observatories Chinese Academy of Sciences Beijing China

8. Key Laboratory for Mineral Resources, Institute of Geology and Geophysics Chinese Academy of Sciences Beijing China

Publisher

Wiley

Subject

Medical Laboratory Technology,Instrumentation,Histology,Anatomy

Reference24 articles.

1. Performance evaluation of vacuum system: Pump‐down time;Chaudhari V. D.;International Journal of Scientific & Engineering Research,2011

2. Plasma etching: Yesterday, today, and tomorrow

3. Experimental study of a low-pressure hybrid RF discharge

4. Fischione P. E.(1997).Plasma processing system for transmission electron microscopy specimens and specimen holders. United States Patent: US5633502 (A).

5. The Use of a Cold Gas Plasma for the Final Processing of Contamination-Free Tem Specimens

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