Ferroelectricity of Lanthanum-Modified Lead-Titanate Thin Films Deposited on Nickel Alloy Electrodes

Author:

Ogawa Toshio,Shindou Satoshi,Senda Atsuo,Kasanami Tohru

Abstract

AbstractLanthanum-modified lead-titanate (Pbo.85Lao.1Ti03) thin films were fabricated by rf magnetron sputtering on various kinds of substrates such as single-crystal MgO (100), r-plane sapphire and SI (100) with an MgO thin film layer. All the films were able to be evaluated using nickel alloy electrodes which possess low reactivity with PbO, excellent heat-resistance and oxidation-resistance. The quality of these films was affected by the kind of substrate and crystal orientation of nickel alloy electrode used. Furthermore, by controlling the crystal orientation of the alloy electrode, films on Si (100) with an MgO (100) layer showed good ferroelectricity.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference13 articles.

1. 13. Ogawa T. , Kidoh H. , Yashima H. , Morimoto A. and Shimizu T. , presented at the 1991 MRS Fall Meeting, Boston, Mass.. 1991, 18.5.

2. Ferroelectric Films Deposited by Reactive Sputtering and Their Properties

3. 12.A catalog of Mitsubishi Materials Corporation, Cat. No. 301 (1990)(in Japanese).

4. 8. Ogawa T. , To be published In Integrated Ferroelectrics (Feb. 1992).

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