Effect of Laser Heating on Compositions of Films Deposited from the Metal Hexacarbonyls-Reference-Cited by-同舟云学术

Effect of Laser Heating on Compositions of Films Deposited from the Metal Hexacarbonyls

Published:1990 Issue: Volume:201 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Singmaster K. A.,Houle F. A.

Abstract

AbstractA systematic study of the composition of metal films thermally deposited by laser heating (cw 514 nm) of the group VI hexacarbonyls is described. The films are found to contain significantly lower levels of carbon and oxygen than photochemically deposited films, and are spatially inhomogeneous. Estimates of temperature to determine the extent of laser heating permit the kinetics of this process to be compared to ∞ desorption from single crystal surfaces.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference19 articles.

1. Adsorption of CO on the (110) plane of tungsten electron impact, thermal desorption, and work function measurements

2. Laser-Induced Metal Deposition on Silicon Membranes for X-Ray Lithography

3. High‐speed laser direct writing of tungsten conductors from W(CO)6

4. The characterization of surface carbides of tungsten

5. Film growth and mechanism of LICVD of chromium films from Cr(CO)6 at 248 nm

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser-CVD of Microstructures;Laser Processing and Chemistry;2011

2. Organochromium precursors for low-temperature OMCVD of chromium-based coatings;Applied Organometallic Chemistry;1992-12

3. Organometallic chemical vapor deposition of tungsten metal, and suppression of carbon incorporation by codeposition of platinum;Applied Physics Letters;1992-10-12