High‐speed laser direct writing of tungsten conductors from W(CO)6
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102848
Reference12 articles.
1. Direct-write metallization of Silicon MOSFET's using laser photodeposition
2. Laser microchemical techniques for reversible restructuring of gate-array prototype circuits
3. Laser-induced selective deposition of micron-size structures on silicon
4. Kr+laser‐induced chemical vapor deposition of W
5. Localized laser chemical processing of tungsten films
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3. Femtosecond laser-induced chemical vapor deposition of tungsten quasi-periodic structures on silicon substrates;Journal of Laser Applications;2018-08
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