Strain Relaxation in Thin Films: the Effect of Dislocation Blocking

Abstract

AbstractThe relaxation of strained layers frequently occurs by the glide of threading dislocations. From very early on in the relaxation process, gliding dislocations will be forced to intersect a number of prior dislocations with almost-perpendicular line directions and their progress may be blocked. This effect has been widely reported in semiconductor films, and there is some experimental evidence that it is reduced when layers are grown on vicinal substrates. This implies that the blocking is sensitively dependent on the dislocation configuration and in particular on the dislocation line directions.In this paper the interactions between gliding threading dislocations and the perpendicular or nearly-perpendicular dislocation in their path are modelled quantitatively. The differences arising from different initial dislocation configurations and different predominant line directions are found to be small. Strain relaxation, at least in its early stages, should be virtually independent of the initial dislocation configuration.