Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/7/2/18/pdf
Reference101 articles.
1. Integrated Optics: An Introduction
2. A RESONANT‐GATE SILICON SURFACE TRANSISTOR WITH HIGH‐QBAND‐PASS PROPERTIES
3. Foreword;Maluf,1999
4. Integrated optic pressure sensor on silicon substrate
5. Electrostatically driven micromechanical 2 × 2 optical switch
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