Abstract
It is well known that the vertical tunnel field effect transistor (TFET) is easier to fabricate than the conventional lateral TFETs in technology. Meanwhile, a lightly doped pocket under the source region can improve the subthreshold performance of the vertical TFETs. This paper demonstrates a dual material gate heterogeneous dielectric vertical TFET (DMG-HD-VTFET) with a lightly doped source-pocket. The proposed structure adopts a GaSb/GaAs0.5Sb0.5 heterojunction at the source and pocket to improve the band-to-band tunneling (BTBT) rate; at the same time, the gate electrode is divided into two parts, namely a tunnel gate (M1) and control gate (M2) with work functions ΦM1 and ΦM2, where ΦM1 > ΦM2. In addition, further performance enhancement in the proposed device is realized by a heterogeneous dielectric corresponding to a dual material gate. Simulation results indicate that DMG-HD-VTFET and HD-VTFET possess superior metrics in terms of DC (Direct Current) and RF (Radio Frequency) performance as compared with conventional VTFET. As a result, the ON-state current of 2.92 × 10−4 A/μm, transconductance of 6.46 × 10−4 S/μm, and average subthreshold swing (SSave) of 18.1 mV/Dec at low drain voltage can be obtained. At the same time, DMG-HD-VTFET could achieve a maximum fT of 459 GHz at 0.72 V gate-to-source voltage (Vgs) and a maximum gain bandwidth (GBW) of 35 GHz at Vgs = 0.6 V, respectively. So, the proposed structure will have a great potential to boost the device performance of traditional vertical TFETs.
Funder
National Natural Science Foundation of China
the Laboratory Open Fund of Beijing Smart-chip Microelectronics Technology Co., Ltd.
Subject
General Materials Science
Cited by
8 articles.
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