Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/9/7/341/pdf
Reference124 articles.
1. Negative photoresists for optical lithography
2. MicroChem Negative Epoxy Resistshttp://www.microchem.com
3. Swiss Made SU-8 Photoepoxy Functional Productshttp://www.gersteltec.ch
4. 3D microfabrication with inclined/rotated UV lithography
5. Application of 3D glycerol-compensated inclined-exposure technology to an integrated optical pick-up head*
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