1. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, China
2. Key Laboratory of Microelectronic Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
3. Institute of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
4. School of Physics and Information Engineering, Shanxi Normal University, Linfen 041004, China
5. Shaanxi Province Key Laboratory of Thin Films Technology Optical Test, Xi’an Technological University, Xi’an 710032, China