The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/16/3/348/pdf
Reference21 articles.
1. The design and analysis of beam-membrane structure sensors for micro-pressure measurement
2. AeroMEMS sensor array for high-resolution wall pressure measurements
3. Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range
4. Micropressure sensor fabrication without problem of stiction for a wider range of measurement
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