The design and analysis of beam-membrane structure sensors for micro-pressure measurement
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3702809
Reference21 articles.
1. Low Pressure Piezoresistive Sensors for Medical Electronics Applications
2. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, New York, 1970), p. 120.
3. A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges
4. The novel structural design for pressure sensors
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