Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range-Reference-Cited by-同舟云学术

Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range

Published:2000-05 Issue:1-3 Volume:83 Page:142-149
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Reynolds J.Kurth,Catling David,Blue Randel C,Maluf Nadim I,Kenny Thomas

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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