Au Doping ZnO Nanosheets Sensing Properties of Ethanol Gas Prepared on MEMS Device

Abstract

Sensitivity of the Micro Electro Mechanical System (MEMS) device ZnO nanosheets sensor and the Au doped ZnO nanosheets sensor has been investigated. The ZnO samples have been prepared using Hydrothermal synthesis at 90 °C. The prepared ZnO nanostructure is tested for structural morphology and crystallinity properties. The elemental analysis of the ZnO sample and Au–ZnO samples are tested by using Energy Dispersive X-ray Spectroscopy (EDS) spectrum analysis. MEMS device microheater is designed and prepared for testing the sensitivity of Ethanol gas. Thermal properties of the MEMS microheater is studied for better gas testing at different temperatures. Both the ZnO nanosheets sensor and Au doped ZnO nanosheets sensor are tested using Ethanol gas, and the gas concentrations are taken to be 15, 30, 45, and 60 ppm at 300 °C. The gas sensing response of pure ZnO nanosheets tested for ethanol gas at 60 ppm showed 20%, while the Au–ZnO nanosheets showed 35%, which is increased by 15% at similar operating conditions.