High selectivity Fe3O4 nanoparticle to volatile organic compound (VOC) for MEMS gas sensors

Abstract

Abstract In the current study, XRD analysis shows the polycrystalline form an inverse spinel Fe3O4 structure. Fe3O4 film is prepared by dip coating method on MEMS gas sensors to test the sensitivity on volatile organic compound (VOC) gas. VOC is being tested at 92 mW (∼300 °C) power consumption with different VOC gas concentrations and also tested with different gases like NO2, SO2, NH3 and CO gas. The results showed that the Fe3O4 gas sensor has better selectivity and high response with VOC 1.2 ppm concentration. Structural morphology is seen and reaction mechanism when VOC gas reacts with Fe3O4 material is also being discussed.