Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition
Author:
Funder
National Science Foundation
Publisher
MDPI AG
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces
Link
http://www.mdpi.com/2079-6412/8/3/97/pdf
Reference29 articles.
1. Thin-film polycrystalline silicon solar cells formed by flash lamp annealing of a-Si films
2. Formation of Highly Uniform Micrometer-Order-Thick Polycrystalline Silicon Films by Flash Lamp Annealing of Amorphous Silicon on Glass Substrates
3. Crystalline Si thin-film solar cells: a review
4. Polysilicon Films Prepared by Plasma Enhanced Chemical Vapor Deposition: Effect of Substrate Temperatureand Annealing Temperature
5. Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid‐phase crystallization: Theory, experiments, and thin‐film transistor applications
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