MEMS-Scanner Testbench for High Field of View LiDAR Applications

Abstract

LiDAR sensors are a key technology for enabling safe autonomous cars. For highway applications, such systems must have a long range, and the covered field of view (FoV) of >45° must be scanned with resolutions higher than 0.1°. These specifications can be met by modern MEMS scanners, which are chosen for their robustness and scalability. For the automotive market, these sensors, and especially the scanners within, must be tested to the highest standards. We propose a novel measurement setup for characterizing and validating these kinds of scanners based on a position-sensitive detector (PSD) by imaging a deflected laser beam from a diffuser screen onto the PSD. A so-called ray trace shifting technique (RTST) was used to minimize manual calibration effort, to reduce external mounting errors, and to enable dynamical one-shot measurements of the scanner’s steering angle over large FoVs. This paper describes the overall setup and the calibration method according to a standard camera calibration. We further show the setup’s capabilities by validating it with a statically set rotating stage and a dynamically oscillating MEMS scanner. The setup was found to be capable of measuring LiDAR MEMS scanners with a maximum FoV of 47° dynamically, with an uncertainty of less than 1%.