A Fiber-Based Chromatic Dispersion Probe for Simultaneous Measurement of X-Axis and Z-Axis Displacements with Nanometric Resolutions

Abstract

In this paper, a fiber-based chromatic dispersion probe for simultaneous measurement of X-axis and Z-axis displacements with nanometric resolutions by using the full width at half maxima (FWHM) of the detected spectral signal has been proposed and demonstrated. For X-axis, FWHM is employed for indicating the X-axis displacement based on the fact that the FWHM remains almost constant with the varying Z-axis displacement of the fiber detector and shows a linear relationship with the X-axis displacement within a specific Z-axis displacement range. For the Z-axis, the linear relationship between the centroid wavelength λ of the detected spectral signal and the Z-axis displacement is employed for indicating the Z-axis displacement based on the fact that the sensitivity (slope of the λ-Z curve) is also linear with X-axis displacement within a certain X-axis displacement range. Theoretical and experimental investigations have verified the feasibility of the proposed chromatic dispersion probe, which yields X- and Z-axis measurement ranges of 2.3 μm and 15 μm and X- and Z-axis measurement resolutions of better than 25 nm and 50 nm, respectively. Experiments were further performed to evaluate the basic performance of the prototype probe and the maximum measurement errors were less than 10 nm and 60 nm for X- and Z-axis displacements, respectively.