Advances in Silicon-Based Integrated Lidar
Author:
Hu Mingxuan12, Pang Yajun12, Gao Long3
Affiliation:
1. Center for Advanced Laser Technology, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China 2. Hebei Key Laboratory of Advanced Laser Technology and Equipment, School of Electronic and Information Engineer, Hebei University of Technology, Tianjin 300401, China 3. Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
Abstract
Silicon-based Lidar is an ideal way to reduce the volume of the Lidar and realize monolithic integration. It removes the moving parts in the conventional device and realizes solid-state beam steering. The advantages of low cost, small size, and high beam steering speed have attracted the attention of many researchers. In order to facilitate researchers to quickly understand the research progress and direction, this paper mainly describes the research progress of silicon-based integrated Lidar, including silicon-based optical phased array Lidar, silicon-based optical switch array Lidar, and continuous frequency-modulated wave Lidar. In addition, we also introduced the scanning modes and working principles of other kinds of Lidar, such as the Micro-Electro-Mechanical System, mechanical Lidar, etc., and analyzed the characteristics of the Lidars above. Finally, we summarized this paper and put forward the future expectations of silicon-based integrated Lidar.
Funder
National Natural Science Foundation of China Natural Science Foundation of Hebei Province, China
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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