Abstract
Along with deep scaling transistors and complex electronics information exchange networks, very-large-scale-integrated (VLSI) circuits require high performance and ultra-low power consumption. In order to meet the demand of data-abundant workloads and their energy efficiency, improving only the transistor performance would not be sufficient. Super high-speed microprocessors are useless if the capacity of the data lines is not increased accordingly. Meanwhile, traditional on-chip copper interconnects reach their physical limitation of resistivity and reliability and may no longer be able to keep pace with a processor’s data throughput. As one of the potential alternatives, carbon nanotubes (CNTs) have attracted important attention to become the future emerging on-chip interconnects with possible explorations of new development directions. In this paper, we focus on the electrical, thermal, and process compatibility issues of current on-chip interconnects. We review the advantages, recent developments, and dilemmas of CNT-based interconnects from the perspective of different interconnect lengths and through-silicon-via (TSV) applications.
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference118 articles.
1. The evolution of interconnect technology for silicon integrated circuitry;Buchanan;Proceedings of the GaAs MANTECH Conference,2002
2. A 22 nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors;Auth;Proceedings of the 2012 Symposium on VLSI Technology (VLSIT),2012
3. The search for the most conductive metal for narrow interconnect lines
4. Interconnect issues post 45nm;Rossnagel;Proceedings of the IEEE International Electron Devices Meeting, 2005. IEDM Technical Digest,2005
5. Interconnect metals beyond copper: Reliability challenges and opportunities;Croes;Proceedings of the 2018 IEEE International Electron Devices Meeting (IEDM),2018
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