Preparation and Performance of Multilayer Si-B-C-N/Diamond-like Carbon Gradient Films

Abstract

Si-B-C-N/diamond-like carbon (DLC) gradient films with different layers were prepared on a glass substrate by radio frequency magnetron sputtering, and the structure and surface morphology of the resulting films were analyzed by scanning electron microscopy, Raman spectrometry, and X-ray photoelectron spectroscopy. The mechanical and optical properties of the films were studied using a multifunctional material mechanical testing system, UV-Vis spectrophotometer, and micro-Vickers hardness tester. The gradient structure promotes the formation of sp3 bonds and improves the hardness and optical transmittance of the resulting films. Among the prepared films, the single-layer Si-B-C-N/DLC gradient film shows the highest optical transmittance (97%). Film–substrate adherence is strengthened by the introduction of the gradient structure. The best adhesion was obtained with a double-layer Si-B-C-N/DLC gradient film. Suitable anti-wear properties were exhibited in both dry (0.18) and wet (0.07) conditions. In this paper, evaluation of the microstructural, optical, and mechanical properties of the films could provide new insights into improvements in the bonding force of glass-based DLC films and enrich the experimental data of DLC multilayer film systems.