Advanced Nanostructured Coatings Deposited by Magnetron Sputtering: Innovations, Applications, and Future Prospects
Author:
Affiliation:
1. Laboratory of Instrumentation, Biomedical Engineering and Radiation Physics (LIBPhys-UNL), Department of Physics, NOVA School of Science and Technology, NOVA University Lisbon, 2829-516 Caparica, Portugal
Abstract
Publisher
MDPI AG
Link
https://www.mdpi.com/2079-6412/14/8/1041/pdf
Reference12 articles.
1. Gold-tantalum alloy films deposited by high-density-plasma magnetron sputtering;Bae;J. Appl. Phys.,2021
2. Zhou, C., Li, T., Wei, X., and Yan, B. (2020). Effect of the Sputtering Power on the Structure, Morphology and Magnetic Properties of Fe Films. Metals, 10.
3. Effect of substrate temperature and RF power on the structural and optical properties of sputtered ZnO thin films;Hajara;J. Phys. Conf. Ser.,2022
4. Ju, Y., Ai, L., Qi, X., Li, J., and Song, W. (2023). Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition. Materials, 16.
5. Nanostructure and Optical Property Tailoring of Zinc Tin Nitride Thin Films through Phenomenological Decoupling: A Pathway to Enhanced Control;Hain;ACS Appl. Nano Mater.,2024
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