Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/18/7/2023/pdf
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1. Improving sensitivity of piezoresistive microcantilever biosensors using stress concentration region designs
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5. Design and Fabrication of a Four-Arm-Structure MEMS Gripper
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