Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity-Reference-Cited by-同舟云学术

Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

Published:2018-06-24 Issue:7 Volume:18 Page:2023
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Tran Anh,Zhang Xianmin,Zhu Benliang^ORCID

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/18/7/2023/pdf

Reference25 articles.

1. Improving sensitivity of piezoresistive microcantilever biosensors using stress concentration region designs

2. Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review

3. Blood pressure measuring devices: recommendations of the European Society of Hypertension

4. Design, optimization and fabrication of surface micromachined pressure sensors

5. Design and Fabrication of a Four-Arm-Structure MEMS Gripper

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