Abstract
A microring resonator with the multimode interference coupler is fabricated on the polymer platform by using UV-based soft nanoimprint technique. A unique class of fluorinated polymer, perfluoropolyether (PFPE), is employed for the fabrication of the flexible soft mold. By optimizing the proportion between Ormocore and the thinner maT, the microring resonator is fabricated almost without residual layer. The fabricated device with a Q-factor up to 2.3 × 104 is demonstrated for very-near-infrared wavelengths, which shows high potential for sensing applications.
Funder
International Science and Technology Cooperation Program of China
Natural Science Foundation of China
National Pre-Research Foundation of China
Fundamental Research Funds for the Central Universities
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Cited by
9 articles.
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