p-GaN Selective Passivation via H Ion Implantation to Obtain a p-GaN Gate Normally off AlGaN/GaN HEMT

Abstract

A dependable and robust technique for nanomachining is ion implantation. In this work, hydrogen (H) ion implantation was used, for the first time, to passivate p-GaN, except for the gate area, in order to create a normally off p-GaN/AlGaN/GaN high-electron-mobility transistor (HEMT). Ion implantation passivation reduces H ion diffusion in p-GaN, allowing it to withstand temperatures above 350 °C. Through experiments and analyses, the H ion implantation energy and dosage required to passivate p-GaN, by generating Mg-H neutral complexes, were determined to be 20 keV and 1.5 × 1013 cm−2, respectively. After conducting annealing procedures at various temperatures, we discovered that 400 °C was the ideal temperature to effectively obtain a normally off p-GaN HEMT. A threshold voltage of 0.8 V was achievable. The p-GaN HEMT also had a breakdown voltage of 642 V at a gate voltage of 0 V, maximum transconductance of 57.7 mS/mm, an on/off current ratio of 108, an on-resistance of 8.4 mm, and a maximum drain current of 240.0 mA/mm at a gate voltage of 6 V after being annealed at 400 °C.