Design of Higher-k and More Stable Rare Earth Oxides as Gate Dielectrics for Advanced CMOS Devices
Author:
Publisher
MDPI AG
Subject
General Materials Science
Link
http://www.mdpi.com/1996-1944/5/8/1413/pdf
Reference43 articles.
1. XPS study of the surface carbonation/hydroxylation state of metal oxides
2. Deep-Submicron Process Technology;Wolf,2002
3. Infrared and electrical properties of amorphous sputtered (LaxAl1−x)2O3 films
4. MOCVD of High-Dielectric-Constant Lanthanum Oxide Thin Films
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