Structural analyses of seeded thin film microcrystalline silicon solar cell

Author:

Agbo S. N.1,Dobrovolskiy S.1,Wegh G.1,van Swaaij R. A. C. M. M.1,Tichelaar F. D.2,Sutta P.3,Zeman M.1

Affiliation:

1. Department of Electrical Sustainable Energy; Delft University of Technology; P. O. Box 5053 2600GB Delft The Netherlands

2. Kavli Institute of Nanoscience Delft; Delft University of Technology; Lorentzweg 1 2628 CJ Delft The Netherlands

3. New Technologies Research Centre; University of West Bohemia; 306 14 Plzen Czech Republic

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane;Koh;Applied Physics Letters,1999

2. Extended phase diagrams for guiding plasma-enhanced chemical vapor deposition of silicon thin films for photovoltaic applications;Ferlauto;Applied Physics Letters,2002

3. Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films;Fujiwara;Physical Review B,2001

4. Agbo SN Van Swaaij RACMM Zeman M Effect of deposition parameters of µc-Si : H solar cell absorber layer on spectral response Proceedings of the Eleventh Annual Workshop on Semiconductor Advances for Future Electronic and SENSORS (SAFE) 2008 440 443

5. Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow;Van den Donker;Applied Physics Letters,2005

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