Using MDECR-PECVD to study the impact of ion bombardment energy on microstructural properties of μc-Si:H thin film grown from an SiF4
/H2
chemistry
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Published:2016-09-07
Issue:10-12
Volume:13
Page:782-785
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ISSN:1862-6351
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Container-title:physica status solidi (c)
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language:en
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Short-container-title:Phys. Status Solidi C
Author:
Wang Junkang,Florea Ileana,Bulkin Pavel V.,Maurice Jean-Luc,Johnson Erik V.
Subject
Condensed Matter Physics