Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. , and , Ion Implantation in Semiconductors (Silicon and Germanium), Academic Press, New York-London 1970.
2. Internet. Conf. Ion Implantation in Semiconductors, KFKI, Budapest 1976 (p. 13).
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4. Diffusion and defect annealing in silicon doped by phosphorus ion implantation
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