Author:
Kirscht F.-G.,Tänzer D.,Hansch C.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. Dislocations in thermally stressed silicon wafers
2. and , II. Symp. Physikalische Grundlagen zu Bauelementetechnologien der Mikroelektronik, Frankfurt (Oder) May 25 to 27, 1982.
3. and , to be published.
Cited by
4 articles.
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