Author:
Kissinger G.,Kissinger W.,Neubert M.
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference8 articles.
1. Thermomechanical Behaviour of Stress-Reduced Silicon Wafers
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3. : to be published
4. Deformation in Dielectric‐Isolated Substrates and Its Control by a Multilayer Polysilicon Support Structure
5. , , : III. Symp. Physikalische Grundlagen zu Bauelementetechnologien der Mikroelektronik, Frankfurt (Oder), 10–12. Sept. 1984, p. 517
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