Silicon nanodot formation and self-ordering under bombardment with heavy Bi3 ions

Author:

Böttger Roman,Heinig Karl-Heinz,Bischoff Lothar,Liedke Bartosz,Hübner René,Pilz Wolfgang

Funder

German Research Foundation

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Reference27 articles.

1. Growth and Erosion of Thin Solid Films

2. Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering

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5. Under these conditions, studies on C, Si and Ge report only for Ge a transformation of the surface layer into a spongy morphology, which is different from surface patterns considered in this work. See e.g.: G. Impellizzeri, S. Mirabella, and M. G. Grimaldi, Appl. Phys. A 103, 323 (2011) or B. L. Darby, B. R. Yates, N. G. Rudwaski, K. S. Jones, A. Kontos, and R. G. Elliman, Thin Solid Films 519, 5962 (2011).

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