Bim+ ion beam patterning of germanium surfaces at different temperatures and ion fluence-Reference-Cited by-同舟云学术

Bim+ ion beam patterning of germanium surfaces at different temperatures and ion fluence

Published:2016-11 Issue:6 Volume:34 Page:061805
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Hernández Angélica Guadalupe¹,Kudriavtsev Yuriy¹

Affiliation:

1. Solid State Electronics Section, Electrical Engineering Department, CINVESTAV-IPN, Av. IPN n. 2508, Col. San Pedro Zacatenco, D.F. C.P. 07360, Mexico

Funder

Consejo Nacional de Ciencia y Tecnología (CONACYT)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4967697

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