1. Light Technology Institute; Karlsruhe Institute of Technology; Engesserstr. 13 76131 Karlsruhe Germany
2. Institute of Microstructure Technology; Karlsruhe Institute of Technology; Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen, Karlsruhe Germany
3. Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg (ZSW); Industriestraße 6 70565 Stuttgart Germany
4. Institute of Nanotechnology, Karlsruhe Nano Micro Facility; Karlsruhe Institute of Technology; Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen, Karlsruhe Germany
5. Institute of Applied Physics; Karlsruhe Institute of Technology; Wolfgang-Gaede-Str. 1 76131 Karlsruhe Germany