Crystal temperature control in the Czochralski crystal growth process
Author:
Publisher
Wiley
Subject
General Chemical Engineering,Environmental Engineering,Biotechnology
Reference40 articles.
1. Nonlinear Feedback Control of Parabolic Partial Differential Equation Systems with Time-dependent Spatial Domains
2. Radiative heat exchange in Czochralski crystal growth
3. Feedback control of linear diffusion processes
4. Capillary phenomena. Part 11.—Approximate treatment of the shape and properties of fluid interfaces of infinite extent meeting solids in a gravitational field
5. Accelerated disturbance damping of an unknown distributed system by nonlinear feedback
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