1. Faculty of Microsystem Electronics and Photonics; Wroclaw University of Technology; Janiszewskiego 11/17 50-372 Wroclaw Poland
2. Ammono SA; Prusa 3 00-493 Warsaw Poland
3. Faculty of Fundamental Problems of Technology; Wroclaw University of Technology; Wybrzeze Wyspianskiego 27 50-370 Wroclaw Poland