Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage-Reference-Cited by-同舟云学术

Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage

Published:2017-09-05 Issue:3 Volume:20 Page:975-992
ISSN:1561-8625
Container-title:Asian Journal of Control
language:en
Short-container-title:Asian Journal of Control

Author:

Boeren Frank¹,Blanken Lennart¹,Bruijnen Dennis¹²,Oomen Tom¹

Affiliation:

1. Department of Mechanical Engineering, Control Systems Technology Group; Eindhoven University of Technology; Eindhoven The Netherlands

2. Philips Innovation Services; Eindhoven The Netherlands

Publisher

Wiley

Subject

Control and Systems Engineering

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