Position-Dependent Motion Feedforward via Gaussian Processes: Applied to Snap and Force Ripple in Semiconductor Equipment-Reference-Cited by-同舟云学术

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Position-Dependent Motion Feedforward via Gaussian Processes: Applied to Snap and Force Ripple in Semiconductor Equipment

Published:2024 Issue: Volume: Page:1-15
ISSN:1063-6536
Container-title:IEEE Transactions on Control Systems Technology
language:
Short-container-title:IEEE Trans. Contr. Syst. Technol.

Author:

Poot Maurice¹^ORCID,van Haren Max¹^ORCID,Kostić Dragan²^ORCID,Portegies Jim³,Oomen Tom¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, The Netherlands

2. ASMPT, Center of Competency, Beuningen, The Netherlands

3. Department of Mathematics and Computer Science, Eindhoven University of Technology, Eindhoven, The Netherlands

Funder

ASMPT

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/87/4389040/10502223.pdf?arnumber=10502223

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