Method for the calculation of the chemical composition of a thin film by Monte Carlo simulation and electron probe microanalysis

Author:

Hu Youhua,Pan Yinrong

Publisher

Wiley

Subject

Spectroscopy

Reference40 articles.

1. In Proceedings of the 5th EMAS Regional Workshop on Electron Probe Microanalysis Today. Trieste, (eds). Czech Technical University: Prague, 2000; 99-109.

2. In Microbeam Analysis, (eds). San Francisco Press: San Francisco, 1990; 21-28.

3. A new method for determining the thickness and composition of thin layers by electron probe microanalysis

4. Thin film analysis by x-ray microanalysis using gaussian Φ (ρ z) curves

5. A method for determining the mass thickness of thin films using electron probe microanalysis

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