Influence of RF Bias on the Deposition of CrN Studied by OES
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference18 articles.
1. A. Barata, L. Cunha, C. Moura. Characterisation of Chrom. Nitride Films Produced by PVD Tech. 2001. San Diego, CA: Elsevier Science B.V.
2. P. Panjan, P. Cvahte, M. Cekada, B. Navinsek, I. Urankar. PVD CrN coating for Protection of Extrusion dies. 2001. Pule: Elsevier Science Ltd.
3. X-ray diffractometry analysis of r.f.-magnetron-sputtered chromium/chromium nitride coatings
4. Microstructure–property relationships in arc-evaporated Cr–N coatings
5. A study of the corrosion behaviour and protective quality of sputtered chromium nitride coatings
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1. Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering;Materials;2023-09-20
2. Obtaining the CrN coating inside the barrel using a cylindrical magnetron with a dynamic magnetic field;AIP Conference Proceedings;2018
3. Comparison of chromium nitride coatings deposited by DC and RF magnetron sputtering;Thin Solid Films;2011-01
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