Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering

Author:

Bai Heda1,Li Jin2,Gao Jialai2,Ni Jinyang1,Bai Yaxiong2,Jian Jie2,Zhao Lin2,Bai Bowen2,Cai Zeyun2,He Jianchao2,Chen Hongsheng2,Leng Xuesong2,Liu Xiangli1

Affiliation:

1. School of Materials Science and Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China

2. Institute of Special Environments Physical Sciences, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China

Abstract

Chromium Nitride (CrN) coatings have widespread utilization across numerous industrial applications, primarily attributed to their excellent properties. Among the different methods for CrN coating synthesis, direct current magnetron sputtering (DCMS) has been the dominant technique applied. Nonetheless, with the expanded applications of CrN coatings, the need for enhanced mechanical performance is concurrently escalating. High-power impulse magnetron sputtering (HiPIMS), an innovative coating deposition approach developed over the past three decades, is gaining recognition for its capability of yielding coatings with superior mechanical attributes, thereby drawing significant research interest. Considering that the mechanical performance of a coating is fundamentally governed by its microstructural properties, a comprehensive review of CrN coatings fabricated through both techniques is presented. This review of recent literature aims to embark on an insightful comparison between DCMS and HiPIMS, followed by an examination of the microstructure of CrN coatings fabricated via both techniques. Furthermore, the exploration of the underlying factors contributing to the disparities in mechanical properties observed in CrN coatings is revealed. An assessment of the advantages and potential shortcomings of HiPIMS is discussed, offering insight into CrN coating fabrication.

Funder

National Natural Science Foundation of China

Shenzhen Science and Technology Program

Guangdong Basic and Applied Basic Research Foundation

Characteristic Innovation Project of Guangdong Educational Department

Publisher

MDPI AG

Subject

General Materials Science

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