Obtaining the CrN coating inside the barrel using a cylindrical magnetron with a dynamic magnetic field

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Betiuk Marek,Domanowski Piotr

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Reference15 articles.

1. H. E. McKelvey, A rtatable magnetron sputtering apparatus, (United States Patent 4,356,073, 1982).

2. Angstrom Sciences – Magnetron, Sputtering Technology & Sputtering Materials, (Information on http://www.angstromsciences.com).

3. Method of using cathode sputtering with rotating target audience, (Europejski Biuletyn Patentowy EP 1722005 B12007/27, 2007).

4. W.P. Leroy, S. Mahieu, R. De Gryse, D. Depla In search fr limits of ratting cylindrical magnetron sputtering, (www.drzaft.ugent.be).

5. J. Walkowicz, Physico-chemical structure of the plasma and chemical and phase composition of the layers produced plasma surface engineering techniques), (ITE Radom, 2003).

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