1. Fraunhofer Institute for Photonic Microsystems IPMS Center Nanoelectronic Technologies (CNT) An der Bartlake 5 01109 Dresden Germany
2. Fraunhofer Institute for Integrated Systems and Device Technology IISB Schottkystraße 10 91058 Erlangen Germany
3. Electron Devices (LEB) Friedrich‐Alexander University Erlangen‐Nuremberg Cauerstr. 6 91058 Erlangen Germany