1. State Key Laboratory of Functional Materials for Informatics; Shanghai Institute of Microsystem and Information Technology; Chinese Academy of Sciences; Shanghai 200050 China
2. School of Physical Science and Technology; ShanghaiTech University; Shanghai 201210 China
3. Department of Microelectronic Science and Engineering; Faculty of Science; Ningbo University; Ningbo 315211 China
4. State Key Laboratory of Infrared Physics; Shanghai Institute of Technical Physics; Chinese Academy of Sciences; Shanghai 200083 China
5. State Key Laboratory of Integrated Optoelectronics; CAS Center for Excellence in Brain Science and Intelligence Technology; Institute of Semiconductors; Chinese Academy of Sciences; Beijing 100049 China