A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide-Reference-Cited by-同舟云学术

A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide

Published:2008-08-04 Issue:33 Volume:47 Page:6177-6179
ISSN:1433-7851
Container-title:Angewandte Chemie International Edition
language:en
Short-container-title:Angew. Chem. Int. Ed.

Author:

Bachmann Julien,Zierold Robert,Chong Yuen Tung,Hauert Roland,Sturm Chris,Schmidt-Grund Rüdiger,Rheinländer Bernd,Grundmann Marius,Gösele Ulrich,Nielsch Kornelius

Publisher

Wiley

Subject

General Chemistry,Catalysis

Reference25 articles.

1. Smart Nanotubes for Bioseparations and Biocatalysis

2. Atomic Layer Epitaxy

3. Atomic layer epitaxy

4. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

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