CMP wastewater management using the concepts of design for environment-Reference-Cited by-同舟云学术

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CMP wastewater management using the concepts of design for environment

Published:2002-04 Issue:1 Volume:21 Page:57-62
ISSN:0278-4491
Container-title:Environmental Progress
language:en
Short-container-title:Environ. Prog.

Author:

Yang Gordon C. C.

Publisher

Wiley

Subject

General Environmental Science

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ep.670210113/fullpdf

Reference33 articles.

1. “ESH Issues Make Progress,” Semiconductor International Online, March 2001.

2. , , , and , “Evaluating and Treating CMP Waste-water,” Semiconductor International Online, October 2000.

3. , and , The CMP Technology for Semiconductor Planarization, Chun-Hwa Scientific Publishing Co., Taipei, Taiwan, (in Chinese), 1999.

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