Low-k Materials: Recent Advances
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John Wiley & Sons, Ltd
Reference180 articles.
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Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-khigh-aspect ratio patterns;Nanotechnology;2016-11-02
2. Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films;Applied Physics Letters;2016-01-04
3. Mechanical property changes in porous low-k dielectric thin films during processing;Applied Physics Letters;2014-10-13
4. Plasma cryogenic etching of silicon: from the early days to today's advanced technologies;Journal of Physics D: Applied Physics;2014-03-06
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