Affiliation:
1. Japan Display Inc. Chiba Japan
2. Idemitsu Kosan Co., Ltd. Chiba Japan
Abstract
We have successfully developed stable poly‐crystalline oxide
semiconductor (Poly‐OS) as channels of TFT on Gen.6 glass
substrates. This technology has significantly improved mobility and
stability at the same time, achieving both extremely low off‐state
current similar to conventional oxide TFTs and high on‐state
current equivalent to LTPS TFTs.
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